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Spectra

Tool requires cleaning

Tool Status: Degraded
Tool Status

Degraded

Check

Spectra

User Action

  • Let the tool run for about one hour.
  • If error persists, follow the cleaning procedure as described in the tutorial / GIM.
  • If error persists, tool requires L3 Service.
  • Please contact service to schedule a Level 3 Service.
    Call Service Team

GIM.pdf (5MB)
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